Bis ethylcyclopentadienyl ruthenium
Web双 (乙基环戊二烯基)钌. 二乙基二茂钌. 32992-96-4. 1-ethylcyclopentane-1,2,3,4,5-pentayl - ruthenium (2:1) 2-ethylcyclopenta-1,3-diene,ruthenium (2+) BIS (ETHYLCYCLOPENTADIENYL)RUTHENIUM (II) ISO 9001:2015 REACH. Bis (ethylcyclopentadienyl)ruthenium (II), 98% (99.9%-Ru), 44-0040, contained in high … WebDec 1, 2024 · We have studied the atomic layer deposition (ALD) of ruthenium using bis(2,4-dimethylpentadienyl) ruthenium and oxygen. We show that the process is …
Bis ethylcyclopentadienyl ruthenium
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WebMar 30, 2012 · Ru Films from Bis(ethylcyclopentadienyl)ruthenium Using Ozone as a Reactant by Atomic Layer Deposition for Capacitor Electrodes. Ja-Yong Kim 1, Deok-Sin … WebSECTION 1. IDENTIFICATION. Product Name: Bis(cyclopentadienyl)ruthenium Product Number: All applicable American Elements product codes, e.g. RU-BC5DE-025 , RU …
WebOct 1, 1999 · Ruthenium (Ru) films were deposited by liquid source chemical vapor deposition using bis-(ethylcyclopentadienyl)ruthenium (Ru(C 2 H 5 C 5 H 4) 2). The crystalline structure, resistivity and residual impurities in the Ru films were investigated. The Ru films were polycrystalline and had a columnar structure; they showed a low resistivity … WebBis(ethylcyclopentadienyl)ruthenium(II) Bis(ethylcyclopentadienyl)ruthenium(II) Synonyms: Diethylruthenocene. CAS Number: 32992-96-4. Molecular Weight: 287.36. Linear Formula: C 7 H 9 RuC 7 H 9. Product Number Product Description SDS; 648663: Pricing: Match Criteria: Product Name, Keyword.
WebTY - GEN. T1 - Atomic layer deposition of ruthenium in various precursors and oxygen doses. AU - Kim, Jun Woo. AU - Son, Kyung Sik. AU - Kim, Byungwoo WebP48 ECS Journal of Solid State Science and Technology, 2 (3) P47-P53 (2013) Table I. Summary of ALD-Ru results. Dep. Resistivity Growth Step Precursor Reactant Temp. ( C) Impurities (μ ·cm) rate (nm/cycle) coverage Refs.Ru(EtCp)2 NH3 plasma 300 - 16 0.18 - 9 NH3 plasma 270 - 12 0.038 - 18 O2 270 < 2 at.% C, O 15 0.15 Excellent [at 0.2 μm wide …
WebBis(ethylcyclopentadienyl)nickel(II); CAS Number: 31886-51-8; Linear Formula: Ni(C5H4C2H5)2; find Sigma-Aldrich-510483 MSDS, related peer-reviewed papers, technical documents, similar products & more at Sigma-Aldrich ... Bis(ethylcyclopentadienyl)ruthenium(II) View Price and Availability. Sigma-Aldrich. …
WebJan 31, 2011 · 22 Aoyama, T. Eguchi, K.: Ruthenium films prepared by liquid source chemical vapor deposition using Bis-(ethylcyclopentadienyl)ruthenium. J. Appl. Phys. 38, L1134 1999 CrossRef Google Scholar. 23 tsa soap restrictionsWebCAS No. 220409-27-8: Bis(isopropylcyclopentadienyl) Ruthenium(II). Colonial Metals is a global supplier of chemical products and services. Call USA headquarters at 410-398 … philly climbing gymWebHowever, Strem offers a well-preferred Bis(ethylcyclopentadienyl)ruthenium(II) [[(CH 3 CH 2)C 5 H 4] 2 Ru] (catalog number 44-0040) precursor for depositing Ru based ALD/CVD films for niche applications, such as aligned RuO 2 nanorods. The pale yellow liquid precursor with a density of 1.3412 and vapor pressure ~0.2mm (85°C), is sold pre ... philly closings title companyWebBis (ethylcyclopentadienyl)ruthenium (II) packaged for use in deposition systems Synonym (s): Ru (EtCp)2, Diethylruthenocene Linear Formula: C7H9RuC7H9 CAS … philly clipWebApr 12, 2011 · Ruthenium (Ru) thin films were grown on thermally-grown SiO2 substrates by thermal atomic layer deposition (ALD) using a sequential supply of a zero metal valence precursor, isopropyl ... tsa soccer club mnWebBis(ethylcyclopentadienyl)ruthenium(II); CAS Number: 32992-96-4; Synonyms: Diethylruthenocene; Linear Formula: C7H9RuC7H9; find Sigma-Aldrich-648663 MSDS, … philly climate changeWebMetallic ruthenium films - made from volatile precursors by evaporation - show superior material properties when being applied in wire diameters of few nanometers or less. The … philly climbing poles